Modeling and Simulation of MicroElectroMechanical Systems
نویسندگان
چکیده
Modeling and simulation of MEMS is of vital importance to develop innovative products and to reduce time-to-market at lower total costs. Advanced design methodologies and a variety of software tools are utilized by the MEMS-Design group in order to analyze complex geometrical structures, to account for interactions among different physical domains and to capture the cooperative play of micro devices and connected electronic circuitry or signal processing units. Computer simulations provide a deep understanding of the device behavior and lead to systems with optimized performance parameters. Activities of the MEMS-Design group are focused on software development for device and system simulations, on modeling and simulation of user-specific applications and practical Microsystems design for prototypes manufactured at our clean room facilities. In particular, we make use of Finite Element Techniques for structural, thermal, electromagnetic and fluid analyses of moving silicon-parts for sensor and actuator applications. Individual effects and cross-talk among different physical domains are either covered by direct coupling algorithms or parameter extraction methods referred as Reduced Order Modeling. Reduced Order Modeling of MEMS allows a tremendous reduction of model size which becomes important for time-domain simulations with several hundreds of steps needed for circuit and control system virtual prototyping. Since Reduced Order Models are based on analytical terms, they can easily transferred from one simulator to others and can be adjusted to experimental data. Automated generation of parametric Reduced Order Models is considered as the ultimate goal for the future. Our work is based on a close cooperation of the Fraunhofer Institute for Reliability and Microintegration, Department Micro Devices and Equipment and the Chemnitz University of Technology, Department Microsystems and Precision Engineering. In-house design, manufacturing and test allow all-embracing service delivered to our partners and customers.
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